Fang-Lin Chao* Chaoyang University of Technology, Wufong, Taichung County 41349, Taiwan, R.O.C.
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The heat generated by a thin film heater causes the temperature of a nearby waveguideto increase. The thermal coupling increases with the waveguide depth. Thermal coupling couldbe reduced by etching a trench between the waveguides. A rib structure under the trench betweenthe waveguides was proposed to further reduce the thermal coupling. The temperature profiles ofthermo-optic waveguides are analyzed by the finite element method and show significant improvementon reducing thermal coupling between the waveguides.ABSTRACT
Keywords:
thermal coupling; finite element analysis; thermo-optic waveguides; trench
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ARTICLE INFORMATION
Accepted:
2007-05-29
Available Online:
2007-07-01
Chao. F.-L. 2007. Trench structure improvement of thermo-opticWaveguides. International Journal of Applied Science and Engineering, 5, 1–5. https://doi.org/10.6703/IJASE.2007.5(1).1
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